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Wet Equipment-CSE
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Wet equipment Nantong CSE Semiconductor Equipment Co. Ltd. is suitable for many applications, including cleaning, etching, stripping, developing etc.
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Advantages of CSE wet process equipment
> wet equipment is suitable for many applications, including cleaning, etching, degumming and developing
> covers an area of small area
> reliability is strong
> unique module structure
Easy maintenance and maintenance, low cost
> maximum compatible application
Each module's separate air exhausting device
> easy to install and update modules based on the manipulator system
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Characteristics and advantages
Many different cleaning processes, such as RCA, IMEC, Pre-Diffusion, Pre-Metal, and various etching processes, including oxidation
Compounds, nitrides, polysilicon, metals, silicides, and nitric compounds
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General characteristics
> for standard or low side flower baskets
Individual modules of each module; effective discharge of acids, alkalis, neutrality, and gas produced by the solvent
The process of drying out
Intelligent self rescue and emergency stop function of wafer
Powerful, simplified scheduler
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Process control ability
The batch follows the whole process
Setting parameter tracking, including temperature, flow, resistivity, chemical measurement, etc.
> batch tracking, error information documents, process real-time monitoring, user level setting
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Graphical user interface
> based on the B&R CPU and IPC interface, the size is 17 inches
Edit menu
> real time flowchart
Auto save (EOR, ERR, ChemLog, etc.)
> multilevel cipher
> network remote control
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Train
Operation, maintenance and process training
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option
> automatic wafer loading and transmission
> wafer ID recognition
> flower basket buffering function
> dry into wet out and wet to dry out (manually loading the wafer area ozone system)
Suitable for size (150, 200 or 300 mm)
Waste liquid management system
Locally installed chemical preparatory grooves for dilution, mixing and chemical liquid preheating devices
Deionized water heating system
Laminar flow
Concentration monitoring system
> deionized water supply point filtration
Fire extinguishing device
> components
> and so on.
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reliability
MTBF > 800 H
The average time interval of more than 300 h auxiliary
But the running time is more than 97%
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Assembly and shipping
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Semiconductor wet cleaning equipment more concerned about the Nantong CSE semiconductor equipment limited company website: 126xa.cn; now 400-8768-09618913575037 consulting can obtain the relevant project in wet cleaning equipment for free
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