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Single cavity vertical dryer -CSE
Application of CSE cleaning system to various cleaning and drying processes
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Advantage
CSE cleaning system is applied to various cleaning and drying processes
Different configurations (devices that can be placed on desktop operations, single independent, double chambers)
> > for wafer size to 200mm
> best area, equipment with rollers can be moved
Superior reliability
Unique modular structure
> it is extremely easy to repair
Easy to use and operate
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The cleaning and drying machine is equipped with two kinds of automatic and manual systems. It is capable of complicate and different process requirements. Its stability and ease of operation will bring additional economic benefits to any factory. RinseSte can handle wafers of different sizes. The software program that studies the design makes the operator get the best control.
The cleaning machine is one of many industrial partners who seek economic benefits through the pursuit of productivity, stability and ease of use.
A good choice, the standard configuration of the equipment is fully capable of realizing the cleaning and drying process of all the ordinary wafers on the market.
Characteristics and advantages
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application
After a variety of process cleaning
General characteristics
> > applies to the diameter of the wafer to 200mm
25 wafer single box process
Standard high edge and low side basket
Optional built-in resistivity detection sensor to control the cleaning process of wafer
Using cold or hot N2 to assist the wafer drying
It is easy to replace the centrifugal head
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Graphical interface
Color 5.7 "touch screen based on PLC
> can edit more than 10 menus, each menu can have 10 steps
> multilevel user density
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General installation parameters
Size: according to customer configuration requirements (long x wide x high)
Rated voltage: 230 VAC
Rated frequency: 50 Hz / 60 Hz
Rated current: 1 x 16 A (etc.)
Train
Operation, maintenance, process training
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option
> the electrostatic device is installed in the process chamber area
Deionized water recovery
Resistivity monitoring device
Automatic loading of mechanical hand
> equipment for table operation, single independent, double chamber
> > SECS/GEM
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Deionized water heating system
> base placement of stainless steel roller
Solvent extinguisher
> a flower basket for special design
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More information about the dryer cleaning equipment, you can pay attention to the CSE website CSE (www.hlkncse. COM), now the hotline consulting 400-8768-09618913575037 can immediately get the relevant solutions for the dryer cleaning equipment
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